GWI Glass Wafer Inspection

The GWI System was build to detect defects in glass wafers early in the production cycle. The system is based on a high resolution smart camera to meet the required accuracy in defect detection.

The complete evaluation of the wafer is done in the smart camera. The picture of the glass wafer is taken and is processed immediately in the camera. The resulting data and images are transferred to the PLC.

There is also an option to connect a display to the camera to see the results on the screen.

To run the evaluation process the Ethernet, RS232 and Power I/O connection is available. The Power I/O contains also the RS232 interface.

The GWI System detects surface errors of glass wafers such as scratches, particles and substrate errors.

 

GWI System Setup

Setup:aluminium (black)
Illumination:LED illumination from the bottom side

Camera Hardware

CPU

Core:
ARM Cortex-A8 with 1 GHz (OMAP3730)
Caches:
L1_ 32KB D+ 32KB I, L2: 256 KB
SIMD
NEON, 8 x 8 bit, VFPv3
DSP
TI DSP C64x @ 800 MHz

Memory

DDR RAM
512 MB
FLASH
2x microSD 1x int., 1x ext.

I/O Interface

SPS
2 In-/ 4-Out optional 4 In-/ 8-Out
sonst.
VGA-Monitor, RS232, USB 2.0

Sensor Type

CMOS and CCD Sensors available

Software

Linux Operating System with GUI

  • EyeVision RT 2.6Rxxx (Drag-and-Drop Programmierung)
  • EyeWeb Webserver
  • EyeControl (Remote control)
  • EyeView and EyeMultiView (Display of up to 16 cameras)

Examples:

bad wafer example
EyeVision Software with detected particles and scratches
EyeVision Software with NOK wafer because of substrate